JPH0431056B2 - - Google Patents

Info

Publication number
JPH0431056B2
JPH0431056B2 JP59148614A JP14861484A JPH0431056B2 JP H0431056 B2 JPH0431056 B2 JP H0431056B2 JP 59148614 A JP59148614 A JP 59148614A JP 14861484 A JP14861484 A JP 14861484A JP H0431056 B2 JPH0431056 B2 JP H0431056B2
Authority
JP
Japan
Prior art keywords
turntable
inspected
average value
unit
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59148614A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6128846A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14861484A priority Critical patent/JPS6128846A/ja
Priority to DE8484114161T priority patent/DE3484982D1/de
Priority to EP84114161A priority patent/EP0146005B1/en
Priority to US06/675,008 priority patent/US4626101A/en
Publication of JPS6128846A publication Critical patent/JPS6128846A/ja
Publication of JPH0431056B2 publication Critical patent/JPH0431056B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/065—Integrating spheres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/104—Mechano-optical scan, i.e. object and beam moving
    • G01N2201/1045—Spiral scan

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14861484A 1983-11-26 1984-07-19 表面検査装置 Granted JPS6128846A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP14861484A JPS6128846A (ja) 1984-07-19 1984-07-19 表面検査装置
DE8484114161T DE3484982D1 (de) 1983-11-26 1984-11-23 Apparat zum nachweis von oberflaechenfehlern.
EP84114161A EP0146005B1 (en) 1983-11-26 1984-11-23 Surface defect inspecting apparatus
US06/675,008 US4626101A (en) 1983-11-26 1984-11-26 Surface defect inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14861484A JPS6128846A (ja) 1984-07-19 1984-07-19 表面検査装置

Publications (2)

Publication Number Publication Date
JPS6128846A JPS6128846A (ja) 1986-02-08
JPH0431056B2 true JPH0431056B2 (en]) 1992-05-25

Family

ID=15456718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14861484A Granted JPS6128846A (ja) 1983-11-26 1984-07-19 表面検査装置

Country Status (1)

Country Link
JP (1) JPS6128846A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62247233A (ja) * 1986-04-21 1987-10-28 Hitachi Electronics Eng Co Ltd 面板回転機構
US4794265A (en) * 1987-05-08 1988-12-27 Qc Optics, Inc. Surface pit detection system and method
JPH0713599B2 (ja) * 1988-03-31 1995-02-15 株式会社ニレコ 微小耳割検出装置
JP5076276B2 (ja) 2005-01-17 2012-11-21 オイレス工業株式会社 複層摺動部材
JP2008032582A (ja) * 2006-07-31 2008-02-14 Hitachi High-Technologies Corp 異物・欠陥検査装置および異物欠陥・検査方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614144A (en) * 1979-07-17 1981-02-10 Ishikawajima Harima Heavy Ind Co Ltd Signal processing method of hot flaw detection
JPS6310509Y2 (en]) * 1980-01-10 1988-03-29
JPS57161642A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface
JPS5839936A (ja) * 1981-09-03 1983-03-08 Matsushita Electric Works Ltd 表面欠陥検出装置

Also Published As

Publication number Publication date
JPS6128846A (ja) 1986-02-08

Similar Documents

Publication Publication Date Title
US4626101A (en) Surface defect inspecting apparatus
US6810139B2 (en) Pixel based machine for patterned wafers
US7616299B2 (en) Surface inspection method and surface inspection apparatus
JP3257692B2 (ja) 表面検査装置
JP2008216054A (ja) 被検査物の検査装置及び被検査物の検査方法
JPS63135848A (ja) 欠陥検査装置
JPH0431056B2 (en])
JPH11153549A (ja) 表面検査方法及びその方法を用いる表面検査装置
JPS61283852A (ja) 表面検査装置
JPS62266444A (ja) 表面検査装置
JP2990820B2 (ja) 表面欠陥検査装置
JPH0513459B2 (en])
JPS6165146A (ja) 表面検査装置
JPH0517482B2 (en])
JPS61133843A (ja) 表面検査装置
JPH07103906A (ja) 表面検査装置
JP3618545B2 (ja) 欠陥検査方法
JPH03181848A (ja) 半導体材料評価装置
JPH08101135A (ja) 異物検査装置
JPS59180313A (ja) 表面検査装置
JPS60113938A (ja) 表面検査装置
JP3584066B2 (ja) 回転体上の異物の位置座標測定装置
JPH023447B2 (en])
JPH063279A (ja) ハードディスク又はウエハーの検査方法及び検査装置
JPH06294744A (ja) 被検査対象物の検査装置